This video best details and explains the fundamentals of an XRF’s Principle of Operation.

A prepared sample specimen is excited by the radiation of an X-Ray.  This causes a electrons from the inner electron shells to get knocked-off. Electrons from outer electron shells drop-in to fill the resultant voids emitting a fluorescence radiation characteristic in its energy distribution for a particular element/material. This fluorescence radiation is counted/measured by the detector.

Generation of the XRF‘s X-ray fluorescence radiation is shown below (simplified):

  • One electron from the K shell is knocked.
  • Resultant voids are filled by either an electron from the L shell or an electron from the M shell.
  • Meanwhile the Kα and Kβ radiation are generated, which is characteristic for the particular element capable of XRF measurements.

working principle of xrf

what is the working principle of XRF

http://xrf-spectroscopy.com/